A study on the characteristics of RF multi hole cathode CCP discharge in various noble gas복수 홀 전극 구조를 갖는 축전 결합 RF 방전 특성에 관한 연구

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Advisors
Chang, Hong-Youngresearcher장홍영
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
2011
Identifier
490162/325007  / 020065131
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 2011.2, [ ii, 61 p. ]

Keywords

CCP; Multi-hole; plasma density; Uniformity; 복수 홀; 축전 결합 플라즈마; 플라즈마 밀도; 균일도; 할로우캐소드; Hollow cathode

URI
http://hdl.handle.net/10203/182353
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=490162&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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