Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

A new type of the sensitive specimen named 'G(c)-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness G(c) of metal thin films on substrates. For the whole modeling process of the G(c)-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the G(c)-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates. (C) 2005 Elsevier B.V. All rights reserved.
Publisher
ELSEVIER SCIENCE SA
Issue Date
2005-08
Language
ENG
Keywords

MECHANICAL-PROPERTIES; FRACTURE ENERGY; ADHESION; DELAMINATION; STRESS; INDENTATION; DIELECTRICS; WEDGE; LINE

Citation

SENSORS AND ACTUATORS A-PHYSICAL, v.122, no.2, pp.291 - 300

ISSN
0924-4247
DOI
10.1016/j.sna.2005.04.017
URI
http://hdl.handle.net/10203/1815
Appears in Collection
ME-Journal Papers(저널논문)
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