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Characterization of sensitivity and resolution of silicon resistive probe Kim, Junsoo; Lee, Jaehong; Song, Ickhyun; Lee, Jong Duk; Park, Byung-Gook; Hong, Seungbum; Ko, Hyoungsoo; et al, JAPANESE JOURNAL OF APPLIED PHYSICS, v.47, no.3, pp.1717 - 1722, 2008-03 |
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