Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject TA2O5 FILMS

Showing results 1 to 4 of 4

1
EFFECTS OF ANNEALING CONDITIONS ON THE PROPERTIES OF TANTALUM OXIDE-FILMS ON SILICON SUBSTRATES

PARK, SW; BAEK, YK; Park, Chong-Ookresearcher; PARK, CO; Lim, Ho Binresearcher, JOURNAL OF ELECTRONIC MATERIALS, v.21, no.6, pp.635 - 639, 1992-06

2
EFFECTS OF ANNEALING IN O-2 AND N-2 ON THE ELECTRICAL-PROPERTIES OF TANTALUM OXIDE THIN-FILMS PREPARED BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

Kim, IL; Kim, Jong-Seok; Kwon, Oh-Seung; Ahn, Sung-Tae; Chun , Soung Soonresearcher; Lee, Won-Jongresearcher, JOURNAL OF ELECTRONIC MATERIALS, v.24, no.10, pp.1435 - 1441, 1995-10

3
MICROSTRUCTURE AND ELECTRICAL-PROPERTIES OF TANTALUM OXIDE THIN-FILM PREPARED BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

KIM, I; AHN, SD; CHO, BW; Ahn, SungTaeresearcher; Lee, JeongYongresearcher; CHUN, JS; Lee, Won-Jongresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.33, no.12A, pp.6691 - 6698, 1994-12

4
STRUCTURAL-PROPERTIES OF TITANIUM-DIOXIDE FILMS GROWN ON P-SI BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION AT LOW-TEMPERATURE

YOON, YS; KANG, WN; YOM, SS; KIM, TW; JUNG, M; PARK, TH; SEO, KY; et al, THIN SOLID FILMS, v.238, no.1, pp.12 - 14, 1994-01

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