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STRUCTURAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBIDE DEPOSITED BY GLOW-DISCHARGE FROM C3H8-SIH4-H2 MIXTURE Park, JH; Kwon, Hyuk-Sang; Lee, JY, JOURNAL OF APPLIED PHYSICS, v.72, no.11, pp.5246 - 5252, 1992-12 |
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