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Showing results 4 to 6 of 6

4
Low-resistivity ruthenium metal thin films grown via atomic layer deposition using dicarbonyl-bis(5-methyl-2,4-hexanediketonato)ruthenium (II) and oxygen

Ko, Eun Chong; Kim, Jae Yeon; Rhee, Hakseung; Kim, Kyung Min; Han, Jeong Hwan, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.156, 2023-03

5
Study of the surface reaction kinetics of (La,Sr)MnO3- oxygen carriers for solar thermochemical fuel production

Kim, YeonJu; Jeong, Seung Jin; Koo, Bonjae; Lee, Siwon; Kwak, No Woo; Jung, WooChul, JOURNAL OF MATERIALS CHEMISTRY A, v.6, no.27, pp.13082 - 13089, 2018-07

6
Thin-film passivation by atomic layer deposition for organic field-effect transistors

Jeon, Hayoung; Shin, Kwonwoo; Yang, Chanwoo; Park, Chan Eon; Park, Sang-Hee Ko, APPLIED PHYSICS LETTERS, v.93, no.16, 2008-10

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