학위논문(박사) - 한국과학기술원 : 생명화학공학과, 2013.2, [ xi, 98 p. ]
nanopattern; patterning; nanostructure; lithography; 나노패턴; 패터닝; 나노구조; 리소그라피; 2차 증착; secondary sputtering
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