THE EFFECT OF AMORPHOUS-SILICON CAPPING ON TITANIUM DURING TISI2 FORMATION BY RTA

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Publisher
CHAPMAN HALL LTD
Issue Date
1990-01
Language
ENG
Article Type
Article
Citation

JOURNAL OF MATERIALS SCIENCE, v.25, no.1A, pp.98 - 102

ISSN
0022-2461
DOI
10.1007/BF00544191
URI
http://hdl.handle.net/10203/1793
Appears in Collection
MS-Journal Papers(저널논문)RIMS Journal PapersEE-Journal Papers(저널논문)

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