Acoustic wave-based NO(2) sensor: Ink-jet printed active layer
Microsphere-templated BaCO(3) films with well-defined area were deposited onto quartz crystal microbalances by thermal ink-jet printing, and the devices were characterized with respect to their microstructures and NO(2) sensing characteristics. Highly porous three-dimensional BaCO(3) frameworks with promising sensor characteristics were obtained. The printed thin films exhibited reversible frequency shifts following exposure to NO(2) and subsequent recovery under CO/CO(2) at 400 degrees C. The feasibility of controlled deposition of complex functional films in controlled patterns is discussed in the context of the direct-write features of ink-jet printing. (C) 2009 Elsevier B.V. All rights reserved.
- Publisher
- ELSEVIER SCIENCE SA
- Issue Date
- 2009-09
- Language
- English
- Article Type
- Article
- Keywords
QUARTZ-CRYSTAL MICROBALANCE; GAS SENSORS; THIN-FILMS; CERAMICS; MICROSPHERES; SENSITIVITY; TECHNOLOGY
- Citation
SENSORS AND ACTUATORS B-CHEMICAL, v.141, no.2, pp.485 - 490
- ISSN
- 0925-4005
- Appears in Collection
- MS-Journal Papers(저널논문)
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