DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, Seung-Youl | ko |
dc.contributor.author | Lee, Jin Ho | ko |
dc.contributor.author | Song, Yoon-Ho | ko |
dc.contributor.author | Kim, Yuon Tae | ko |
dc.contributor.author | Cho, Kyoung Ik | ko |
dc.contributor.author | Yoo, Hyung Joun | ko |
dc.date.accessioned | 2013-08-08T04:08:10Z | - |
dc.date.available | 2013-08-08T04:08:10Z | - |
dc.date.created | 2013-07-31 | - |
dc.date.created | 2013-07-31 | - |
dc.date.issued | 1998-03 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.16, no.2, pp.871 - 874 | - |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | http://hdl.handle.net/10203/174267 | - |
dc.description.abstract | We observed the emission characteristics and stability of TiN-coated Si field emitter arrays (FEAs) with a TIW gate structure. The TiN layer on Si tips was formed by a two-step rapid thermal nitridation process in an NH3 ambient by which a Ti layer was thermally converted to a TiN/TiSi2 bilayer. This process could suppress the formation of TiO2 on the surface and make the TiN layer thicker than a one-step process. By coating Si tips with TiN, the operating voltage of the TiN-coated Si FEAs was reduced by about 20 V compared with non-coated ones. Also, the TiN-coated Si FEAs showed thermally stable electron emission compared with non-coated ones. (C) 1998 American Vacuum Society. [S0734-211X(98)08002-0]. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Emission characteristics of TiN-coated silicon field emitter arrays | - |
dc.type | Article | - |
dc.identifier.wosid | 000073167200085 | - |
dc.identifier.scopusid | 2-s2.0-0000713452 | - |
dc.type.rims | ART | - |
dc.citation.volume | 16 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 871 | - |
dc.citation.endingpage | 874 | - |
dc.citation.publicationname | JOURNAL OF VACUUM SCIENCE TECHNOLOGY B | - |
dc.identifier.doi | 10.1116/1.590222 | - |
dc.contributor.localauthor | Yoo, Hyung Joun | - |
dc.contributor.nonIdAuthor | Kang, Seung-Youl | - |
dc.contributor.nonIdAuthor | Lee, Jin Ho | - |
dc.contributor.nonIdAuthor | Song, Yoon-Ho | - |
dc.contributor.nonIdAuthor | Kim, Yuon Tae | - |
dc.contributor.nonIdAuthor | Cho, Kyoung Ik | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
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