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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Journal Papers(저널논문)

SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment,

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dc.contributor.authorLee, JHko
dc.contributor.authorLee, Tae-Eogko
dc.date.accessioned2007-10-09T05:50:59Z-
dc.date.available2007-10-09T05:50:59Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2004-03-
dc.identifier.citationIEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58-
dc.identifier.issn1070-9932-
dc.identifier.urihttp://hdl.handle.net/10203/1700-
dc.description.abstractA Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment.-
dc.description.sponsorshipAdvanced Manufacturing System Project Grant 5-4-1-2 of the Korean Ministry of Commerce, Industry and Energy(MOCIE), and Tong-il Heavy Industries Co., Ltd., Korea, during 1997-1999, and Joosung Engineering Ltd., Koreaen
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.subjectSUPERVISORY CONTROL-
dc.subjectCLUSTER TOOLS-
dc.subjectDESIGN-
dc.titleSECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment,-
dc.typeArticle-
dc.identifier.wosid000220349700007-
dc.identifier.scopusid2-s2.0-1842730995-
dc.type.rimsART-
dc.citation.volume11-
dc.citation.issue1-
dc.citation.beginningpage41-
dc.citation.endingpage58-
dc.citation.publicationnameIEEE ROBOTICS & AUTOMATION MAGAZINE-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorLee, Tae-Eog-
dc.contributor.nonIdAuthorLee, JH-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorintegrated equipment-
dc.subject.keywordAuthorcontroller-
dc.subject.keywordAuthorsemiconductor manufacturing-
dc.subject.keywordAuthorfieldbus-
dc.subject.keywordAuthordistributed control application-
dc.subject.keywordAuthorobject-oriented-
dc.subject.keywordPlusSUPERVISORY CONTROL-
dc.subject.keywordPlusCLUSTER TOOLS-
dc.subject.keywordPlusDESIGN-
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