SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment,

A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2004-03
Language
ENG
Keywords

SUPERVISORY CONTROL; CLUSTER TOOLS; DESIGN

Citation

IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58

ISSN
1070-9932
URI
http://hdl.handle.net/10203/1700
Appears in Collection
IE-Journal Papers(저널논문)
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