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Combinatorial synthesis of Al, Ga-based ZnO thin films by Liquid Source Misted Chemical Vapor Deposition Woo, Seong-Ihl; Kim, Gil-Ho, 5th International Conference on Combinatorial and High-throughput Materials Science., DECHEMA, 2008-09 |
LSMCD장비를 이용 Boron 도핑 ZnO 박막제조 및 특성평가 우성일; 김길호; 방정식, 하계한국전기전자재료학회, 한국전기전자재료학회, 2008-06 |
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