Browse "Dept. of Chemical and Biomolecular Engineering(생명화학공학과)" by Author C.W. Nam

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CF4 / O2 식각 가스계를 사용한 텅스텐 박막의 건식 식각 연구

S.K. Kwon; C.W. Nam; S.I. Wooresearcher, KOREAN CHEMICAL ENGINEERING RESEARCH(HWAHAK KONGHAK), v.31, no.6, pp.675 - 682, 1993

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