Fabrication of carbon nanomechanical resonators with embedded single walled carbon nanotube stiffening layers

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Issue Date
2010-01-24
Language
ENG
Citation

23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, pp.268 - 271

ISSN
1084-6999
URI
http://hdl.handle.net/10203/166867
Appears in Collection
ME-Conference Papers(학술회의논문)
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