Determination of two-dimensional planar displacement by moire fringes of concentric-circle gratings

We investigate the moire fringe pattern of two concentric-circle gratings with the aim of measuring the relative two-dimensional planar displacement induced between the gratings. In the first stage we give a comprehensive mathematical approach for the analysis of fringe patterns. Then we suggest a fast computational measurement algorithm that uses a Fourier transformation technique. Finally, our experimental results prove that a measuring accuracy of 0.01 mum can be achieved with this method.
Publisher
OPTICAL SOC AMER
Issue Date
1994-08
Language
ENG
Description

This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/abstract.cfm?URI=ao-33-22-5171 . Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Keywords

X-RAY-LITHOGRAPHY; PATTERNS

Citation

APPLIED OPTICS, v.33, no.22, pp.5171 - 5176

ISSN
1559-128X
URI
http://hdl.handle.net/10203/1658
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
Determination of 2-Dimensional Planar Displacement from Moire Fringes of Concentric Circle Gratings.pdf(851.23 kB)Download
  • Hit : 438
  • Download : 490
  • Cited 0 times in thomson ci
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡClick to seewebofscience_button
⊙ Cited 15 items in WoSClick to see citing articles inrecords_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0