Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control

For ultraprecision, three-dimensional surface metrology such as atomic force microscopy, PZT ceramic actuators are popularly used to scan a testpiece in the lateral directions while its vertical dimension is traced by a measuring probe. In this type of scanning microscopy, the measuring accuracy in lateral dimensions is critically limited by hysteresis errors in PZT ceramics when operated by simple open-loop control. We describe a feed-forward control method to effectively reduce scanning errors by using deterministic hysteresis path models. Experimental results prove that this method can enhance scanning accuracy by an order of 10 as compared with conventional open-loop scanning.
Publisher
Elsevier Inc.
Issue Date
1994-01
Language
ENG
Citation

PRECISION ENGINEERING, v.16, no.1, pp.49 - 55

ISSN
0141-6359
DOI
10.1016/0141-6359(94)90018-3
URI
http://hdl.handle.net/10203/1657
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
Improvement of Scanning Accuracy of PZT Piezoelectric Actuators by Model-Reference Control.pdf(587 kB)Download
  • Hit : 657
  • Download : 1263
  • Cited 0 times in thomson ci
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡClick to seewebofscience_button
⊙ Cited 72 items in WoSClick to see citing articles inrecords_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0