PORTABLE INSPECTION OF PRECISION SURFACES BY PHASE-SHIFTING INTERFEROMETRY WITH AUTOMATIC SUPPRESSION OF PHASE-SHIFT ERRORS

One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as to enhance achievable measurement accuracy. We propose a new phase-measuring algorithm that can identify the actual amounts of phase shifts directly from interferograms without prior calibration, This is named the A-bucket algorithm and has the advantage of being inherently free from any phase-shift error that is constant across an interferogram. The main emphasis of this paper is given to a practicable application of the A-bucket algorithm to prove that accurate measurement is allowed in portable mode even in the presence of vibration.
Publisher
SOC PHOTO-OPT INSTRUM ENG
Issue Date
1995-05
Language
ENG
Description

Copyright 1995 Society of Photo-Optical Instrumentation Engineers.

Keywords

HETERODYNE

Citation

OPTICAL ENGINEERING, v.34, no.5, pp.1400 - 1404

ISSN
0091-3286
URI
http://hdl.handle.net/10203/1656
Appears in Collection
ME-Journal Papers(저널논문)
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