나노인덴터를 활용한 RF MEMS 스위치의 신뢰성 평가 연구Characterization of Contact Reliability in RF MEMS Switch Using Nano-Indenter
- Publisher
- 한국MEMS학술대회
- Issue Date
- 2010-04-01
- Language
- KOR
- Citation
제12회 한국MEMS학술대회, pp.245 - 246
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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