Optofluidic maskless lithography system
We propose and demonstrate an optofluidic maskless lithography technique to fabricate various polymer microparticles and microwires in microfluidic channels. Combining maskless lithography and microfluidic systems, we demonstrate temporal and spatial control of polymeric micro structure generation in microfluidic channels.
- Publisher
- TRANSDUCERS
- Issue Date
- 2007-06-10
- Language
- English
- Citation
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, pp.1569 - 1572
- Appears in Collection
- EE-Conference Papers(학술회의논문)
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