Bias voltgae에 따른 TiCrAlSiN 코팅막의 미세구조 분석Microstructural Characterization of TiCrAlSiN Thin Films Deposited with Various Bias Voltages
- Publisher
- 한국표면공학회
- Issue Date
- 2007
- Language
- KOR
- Citation
한국표면공학회
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.