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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

다결정 실리콘 씨앗층에서의 Hot-wire CVD 방법을 이용한 에피택셜 실리콘 성장에 관한 연구

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Ahn, Byung Taeresearcher
Issue Date
2007-05-10
Language
KOR
Citation

한국재료학회 춘계학술발표대회

URI
http://hdl.handle.net/10203/158170
Appears in Collection
MS-Conference Papers(학술회의논문)
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