DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Y | - |
dc.contributor.author | Youn, S | - |
dc.contributor.author | Han, W | - |
dc.contributor.author | Cho, Young-Ho | - |
dc.contributor.author | Park, H | - |
dc.contributor.author | Chang, B | - |
dc.contributor.author | Oh, Y | - |
dc.date.accessioned | 2013-03-26T23:24:54Z | - |
dc.date.available | 2013-03-26T23:24:54Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009-06-21 | - |
dc.identifier.citation | TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, v., no., pp.1059 - 1062 | - |
dc.identifier.uri | http://hdl.handle.net/10203/157108 | - |
dc.language | ENG | - |
dc.title | Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheet | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-71449094507 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 1059 | - |
dc.citation.endingpage | 1062 | - |
dc.citation.publicationname | TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | Kim, Y | - |
dc.contributor.nonIdAuthor | Youn, S | - |
dc.contributor.nonIdAuthor | Han, W | - |
dc.contributor.nonIdAuthor | Park, H | - |
dc.contributor.nonIdAuthor | Chang, B | - |
dc.contributor.nonIdAuthor | Oh, Y | - |
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