Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheet

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Issue Date
2009-06-21
Language
ENG
Citation

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1059 - 1062

URI
http://hdl.handle.net/10203/157108
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BiS-Conference Papers(학술회의논문)
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