A Study on Characteristics of SF6/O2 Capacitive Discharge with QMS and Langmuir Probe
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chang, Hong-Young | - |
| dc.contributor.author | Lee, HS | - |
| dc.contributor.author | Ahn, SK | - |
| dc.contributor.author | You, SJ | - |
| dc.date.accessioned | 2013-03-26T01:36:00Z | - |
| dc.date.available | 2013-03-26T01:36:00Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2007 | - |
| dc.identifier.citation | AEPSE 2007, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/156817 | - |
| dc.language | ENG | - |
| dc.publisher | AEPSE | - |
| dc.title | A Study on Characteristics of SF6/O2 Capacitive Discharge with QMS and Langmuir Probe | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | AEPSE 2007 | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Chang, Hong-Young | - |
| dc.contributor.nonIdAuthor | Lee, HS | - |
| dc.contributor.nonIdAuthor | Ahn, SK | - |
| dc.contributor.nonIdAuthor | You, SJ | - |
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