Focal tunable liquid lens integrated with an electromagnetic actuator

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In this letter, a focal tunable liquid lens using a large deformable polydimethylsiloxane (PDMS) membrane is integrated with an electromagnetic microactuator for uniform pressure on the membrane by a fabrication process of PDMS compatible with conventional micromachining processes. The fabricated device is characterized by surface profiling and optical observations. A rectangular PDMS membrane of 3 mm in width for actuation shows that the maximum displacement is 51.4 mu m when the current is 30 mA. In the optical observations, the image is blurred when the applied current is varied. From the result, it was found that the device changes the focal length. (c) 2007 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2007-03
Language
ENG
Article Type
Article
Citation

APPLIED PHYSICS LETTERS, v.90, no.12, pp.177 - 187

ISSN
0003-6951
DOI
10.1063/1.2716213
URI
http://hdl.handle.net/10203/1555
Appears in Collection
ME-Journal Papers(저널논문)
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