DC Field | Value | Language |
---|---|---|
dc.contributor.author | 강경수 | - |
dc.contributor.author | 이준석 | - |
dc.contributor.author | 최재성 | - |
dc.contributor.author | 곽윤근 | - |
dc.contributor.author | 김수현 | - |
dc.date.accessioned | 2013-03-18T20:14:41Z | - |
dc.date.available | 2013-03-18T20:14:41Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004 | - |
dc.identifier.citation | 대한기계학회 2004년도 춘계학술대회 , v.0, no.0, pp.923 - 928 | - |
dc.identifier.uri | http://hdl.handle.net/10203/152085 | - |
dc.description.abstract | AFM tip has been used for surface profiling with a fine resolution, but there is a barrier to improve its performance because of the low aspect ratio. Many researchers have solved this problem with attaching carbon nanotube (CNT) to Si-tip. In this paper, we proposed the aligner system that composed of dual type stage system, and these stages could attach a carbon nanotube to tungsten-tip in vacuum condition. We used tungsten tip instead of Si-tip because of its conductivity. The aligner system proposed in this paper has 10 degree-of-freedom that 3 in the first stage and 7 in the second stage. With picomotors and piezotube, the first stage has the resolution about several tens of nm and the second stage has a resolution about a nm. We experimented on characterization of Nano Aligner System and operated picomotors in SEM environment. | - |
dc.language | KOR | - |
dc.publisher | 대한기계학회 | - |
dc.title | 탄소 나노 튜브-팁 제작을 위한 다자유도 나노 정렬 시스템 개발 | - |
dc.title.alternative | Development of Multi-DOF Nano Aligner System for CNT-Tip | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.volume | 0 | - |
dc.citation.issue | 0 | - |
dc.citation.beginningpage | 923 | - |
dc.citation.endingpage | 928 | - |
dc.citation.publicationname | 대한기계학회 2004년도 춘계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 김수현 | - |
dc.contributor.nonIdAuthor | 강경수 | - |
dc.contributor.nonIdAuthor | 이준석 | - |
dc.contributor.nonIdAuthor | 최재성 | - |
dc.contributor.nonIdAuthor | 곽윤근 | - |
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