나노 복화(複畵)공정을 이용한 직접적 패터닝에 관한 연구 Direct Patterning on Glass Plate using a Nano Replication Printing(nRP) Process

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A method of patterning submicron detailed figures, called as a nano replication printing (nRP), with two-photon-absorbed polymerization initiated by a femtosecond Ti:sapphire laser is proposed. In this method, the laser is scanned on a photosensitive urethane acrylate monomer resin, to induce photo-polymerization by two photon absorption along the rows of a voxel matrix transformed from a bitmap picture. The replicated figures with various dimensions, including sizes down to ~ 15 ㎛, can be fabricated experimentally with edge resolution of around 200㎚. Through the nRP process, the nano/micro-scaled direct patterning without any mask using a black-and-white type of bitmap file can be technologically feasible. The effectiveness of the proposed process has been verified by pattering several figures.
Publisher
대한기계학회
Issue Date
2003
Language
KOR
Citation

대한기계학회 생산 및 설계부문 학술대회, pp.0 - 0

URI
http://hdl.handle.net/10203/151950
Appears in Collection
ME-Conference Papers(학술회의논문)
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