Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject parallel chambers
Showing results 1 to 3 of 3
| Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules Kim, Hyunjung; Lee, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.2, pp.898 - 907, 2019-04 |
| Completion Time Analysis of Wafer Lots in Single-Armed Cluster Tools With Parallel Processing Modules Lee, Jun-Ho; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.14, no.4, pp.1622 - 1633, 2017-10 |
| Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.3, pp.1058 - 1070, 2019-07 |
Discover
Open Access
Date issued
- 593 2020 - 2024
- 1,944 2010 - 2019
- 1,604 2000 - 2009
- 1,156 1990 - 1999
- 507 1980 - 1989