Fully integrated low phase-noise VCOs with on-chip MEMS inductors

We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-mum mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2003-01
Language
ENG
Keywords

SILICON; OSCILLATORS; BAND

Citation

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, v.51, no.1, pp.289 - 296

ISSN
0018-9480
URI
http://hdl.handle.net/10203/1499
Appears in Collection
EE-Journal Papers(저널논문)
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