α, γ, and normal, abnormal glow discharge modes in radio-frequency capacitively-coupled discharges at atmospheric pressure
- Issue Date
- 2006-04
- Language
- KOR
- Citation
제82회 한국물리학회 봄 학술대회
- Appears in Collection
- NE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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