A study on the microstructure of preferred orientation of lead zirconate titanate (PZT) thin films

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The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the preferred orientation of the PZT thin films were studied. The films were fabricated with different coating cycles (3, 5, 7, 9, 11), dried at 330 degrees C for different holding times (5, 30, 60 min), and then annealed at the same temperature of 650 degrees C using rapid thermal annealing (RTA). The preferred orientations of the films were investigated using x-ray diffraction and glancing angle x-ray diffraction. The microstructure and the selected area diffraction pattern of the PZT thin films were also investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively.
Publisher
CAMBRIDGE UNIV PRESS
Issue Date
1997-04
Language
ENG
Article Type
Article
Citation

JOURNAL OF MATERIALS RESEARCH, v.12, no.4, pp.1043 - 1047

ISSN
0884-2914
URI
http://hdl.handle.net/10203/1487
Appears in Collection
MS-Journal Papers(저널논문)
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