A Lithographic and Plasma Etch Based Method for the Microfabrication of Porous Silicon Photonic Crystal Particles
- Issue Date
- 2006-03
- Language
- ENG
- Citation
5th International conference on Porous Semiconductors Science and Technology
- Appears in Collection
- BiS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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