Multi-Scale Simulation of Plasma Generation and Film Deposition in a Circular Type DC Magnetron Sputtering System
- Issue Date
- 2003
- Language
- ENG
- Citation
The 4th Asian-European International Conference on Plasma Surface Engineering, pp.184 - 184
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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