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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

A 3-dimensional model for step coverage by atomic layer deposition in a patterned structure

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Kim J.-Y. / Kim J.-H. / Ahn J.-H. / Kang S.-W.researcher
Issue Date
2005-10-16
Language
ENG
Citation

208th Meeting of The Electrochemical Society, pp.917 -

ISSN
1091-8213
URI
http://hdl.handle.net/10203/138817
Appears in Collection
MS-Conference Papers(학술회의논문)
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