Nanopatterned magnetic metal via colloidal lithography with reactive ion etching

Cited 55 time in webofscience Cited 54 time in scopus
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Publisher
AMER CHEMICAL SOC
Issue Date
2004-11
Language
English
Article Type
Article
Keywords

PERIODIC NANOPILLAR ARRAYS; NANOSPHERE LITHOGRAPHY; SOFT LITHOGRAPHY; FABRICATION; SIZE; PARTICLES; SURFACES; CRYSTALS; SHAPE; MASKS

Citation

CHEMISTRY OF MATERIALS, v.16, pp.4208 - 4211

ISSN
0897-4756
DOI
10.1021/cm048688s
URI
http://hdl.handle.net/10203/13863
Appears in Collection
CBE-Journal Papers(저널논문)RIMS Journal Papers
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