탄성힌지를 적용한 레버 구조의 모형화

Abstract

Lever structure with flexure hinges is widely used for many precise mechanisms such as semiconductor lithography equipment and various precise optical stages. To analyze lever structure, simple lever rule and rigid body modeling method are used. But the former is not appropriate for precise output motion, while the latter is only applicable to rigid lever. In this study, simple analytic method is presented. Flexure hinge and lever beam are considered as elastic elements. And also, the method is verified by comparing the results of the suggested method with the simulation results using both the rigid modeling method and the FEM software package (I-DEAS).