탄성힌지를 적용한 레버 구조의 모형화 Modeling Method of the Lever Structure with Flexure Hinges

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Lever structure with flexure hinges is widely used for many precise mechanisms such as semiconductor lithography equipment and various precise optical stages. To analyze lever structure, simple lever rule and rigid body modeling method are used. But the former is not appropriate for precise output motion, while the latter is only applicable to rigid lever. In this study, simple analytic method is presented. Flexure hinge and lever beam are considered as elastic elements. And also, the method is verified by comparing the results of the suggested method with the simulation results using both the rigid modeling method and the FEM software package (I-DEAS).
Publisher
한국정믹공학회
Issue Date
1999
Language
KOR
Citation

한국정밀공학회 99년 춘계학술대회, v.99, pp.244 - 248

URI
http://hdl.handle.net/10203/137352
Appears in Collection
ME-Conference Papers(학술회의논문)
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