A Study on the Formation and Characteristics of a-Fluoronated Carbon Films by CF4/CH4-ICPCVD

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Publisher
The ELECTROCHEMICAL SOCIETY
Issue Date
2000
Language
ENG
Citation

The ELECTROCHEMICAL SOCIETY 197th Meeting

URI
http://hdl.handle.net/10203/137136
Appears in Collection
PH-Conference Papers(학술회의논문)
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