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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

157 nm 광리소그래피 위상변위 마스크용 Si-O-N-F 박막의 특성연구

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노광수researcher / 김성관 / 김형도 / 김정민 / 김상호
Publisher
한국재료학회
Issue Date
2002-05-01
Language
KOR
Citation

한국재료학회 춘계학술발표

URI
http://hdl.handle.net/10203/136210
Appears in Collection
MS-Conference Papers(학술회의논문)
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