D.C. Magnetron Reactive sputtering 법으로 증착한 ITO박막의 밀도가 비저항, 잔류응력에 미치는 영향

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Issue Date
1999
Language
KOR
Citation

추계 한국요업학회

URI
http://hdl.handle.net/10203/135611
Appears in Collection
MS-Conference Papers(학술회의논문)
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