Soft x-ray microscope constructed with a PMMA phase-reversal zone plate

A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source. The 61st harmonic centered at 113 nm was optimized in spectral sharpness and intensity by controlling the incident laser energy and chirp. A phase-reversal zone plate made of polymethyl methacrylate more than doubled the first-order efficiency. The nano patterns, imaged on an x-ray CCD with a magnification of 650, showed that the measured resolution of the microscope was better than 100 nm. (C) 2009 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2009-02
Language
ENG
Keywords

NM

Citation

OPTICS LETTERS, v.34, no.3, pp.235 - 237

ISSN
0146-9592
DOI
10.1364/OL.34.000235
URI
http://hdl.handle.net/10203/13412
Appears in Collection
PH-Journal Papers(저널논문)
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