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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

A circuit model of inductively coupled plasma discharge based on an electron heating model

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Choi, Duk In
Issue Date
1999
Language
ENG
Citation

APFA/APPTC'99

URI
http://hdl.handle.net/10203/133426
Appears in Collection
PH-Conference Papers(학술회의논문)
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