Tunneling nitride insulator grown by electron cyclotron resonance nitrogen plasma nitridation for low-voltage EEPROM

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Issue Date
2001
Language
KOR
Citation

The 8th Korean Conference on Semiconductors, pp.15 - 16

URI
http://hdl.handle.net/10203/133280
Appears in Collection
EE-Conference Papers(학술회의논문)
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