Mechanically Modulated Actuators and Branched Finger Detectors for Nano-Precision MEMS Applications

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Issue Date
2002-10-16
Language
ENG
Citation

Inter. Conf. on Control, Automation and Systems (ICCAS-2002), pp.218 - 223

URI
http://hdl.handle.net/10203/133028
Appears in Collection
BiS-Conference Papers(학술회의논문)
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