SEM and Auger Studies of a PLZT Thin-Film

The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.
Publisher
MATERIALS RESEARCH SOCIETY
Issue Date
1993-02
Language
ENG
Citation

JOURNAL OF MATERIALS RESEARCH, v.8, no.2, pp.245 - 248

ISSN
0884-2914
URI
http://hdl.handle.net/10203/1320
Appears in Collection
MS-Journal Papers(저널논문)
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