고감지전압 및 가지전극을 이용한 자율균형력 발생 고정도 정전용량형 미소가속도계

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Issue Date
2002-04-12
Language
KOR
Citation

제4회 MEMS 학술대회, pp.24 - 29

URI
http://hdl.handle.net/10203/131915
Appears in Collection
BiS-Conference Papers(학술회의논문)
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