사각고리형 AuSn 합금박막을 이용한 MEMS 밀봉 패키징 및 특성시험

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Publisher
대한기계학회
Issue Date
2002-10-11
Language
KOR
Citation

대한기계학회 생산 및 설계공학부문 추계학술대회, pp.24 - 28

URI
http://hdl.handle.net/10203/131913
Appears in Collection
BiS-Conference Papers(학술회의논문)
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