Residual Stress and Thickness Control of Piezoelectric Multi-layer Micromirror Actuators for Initial Deflection Minimization
- Issue Date
- 1999-11-14
- Language
- ENG
- Citation
ASME, pp.101 - 103
- Appears in Collection
- BiS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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