초기변형 최소화를 위한 압전 다층 박막 액추에이터의 설계, 제작 및 실험

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Issue Date
1999-04-01
Language
KOR
Citation

MEMS 학술대회, pp.195 - 201

URI
http://hdl.handle.net/10203/128959
Appears in Collection
BiS-Conference Papers(학술회의논문)
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