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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Journal Papers(저널논문)

Holographic Fabrication of Microstructures with Internal Nanopatterns Using Microprism Arrays

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Lee, Seung-Kon / Park, Hyo Sung / Yi, Gi-Ra / Moon, Jun Hyuk / Yang, Seung-Manresearcher
Publisher
WILEY-V C H VERLAG GMBH
Issue Date
2009-09
Language
English
Article Type
Article
Keywords

3-DIMENSIONAL NANOSTRUCTURES; PHASE MASKS; INTERFERENCE LITHOGRAPHY; PHOTONIC NANOSTRUCTURES; STEP; NANOFABRICATION; EXPOSURES; STAMPS

Citation

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, v.48, no.38, pp.7000 - 7005

ISSN
1433-7851
DOI
10.1002/anie.200901166
URI
http://hdl.handle.net/10203/12835
Appears in Collection
CBE-Journal Papers(저널논문)
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